Metrological features of diffractive high-efficiency objectives for laser interferometry

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4900, Issue 2, 2002, Pages 873-884

  Pruss, C ^a   Reichelt, S ^a   Tiziani, H J ^a   Korolkov, V P ^b  

^a UNIVERSITY OF STUTTGART   (Germany)

^b INSTITUTE OF AUTOMATION AND ELECTROMETRY   (Russian Federation)

Author keywords

Circular laser writing system; Diffractive optical elements; Gray scale fabrication; Optical testing

Indexed keywords

ABERRATIONS; COMPUTER SIMULATION; INTERFEROMETERS; INTERFEROMETRY; LASER APPLICATIONS; OPTICAL DESIGN; OPTICAL DEVICES; OPTICAL TESTING; OPTICAL VARIABLES MEASUREMENT; PHOTORESISTS; RAY TRACING; SUBSTRATES;

CIRCULAR LASER WRITING SYSTEM; DIFFRACTIVE OPTICAL ELEMENT; DIRECT LASER WRITING; GRAY SCALE FABRICATION; LASER INTERFEROMETRY; POLAR COORDINATE LASER SYSTEM;

DIFFRACTIVE OPTICS;

EID: 0036450316     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.484473     Document Type: Conference Paper

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