Machine tool embedded white light interferometrical sensor for diameter measurements

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5144, Issue , 2003, Pages 484-491

  Franz, Stefan ^a   Windecker, Robert ^a   Tiziani, H J ^a  

^a UNIVERSITY OF STUTTGART   (Germany)

Author keywords

Diameter measurement; In line process control; Machine tool evaluation; Optical delay line scanner; Shape measurement; White light interferometry

Indexed keywords

COHERENT LIGHT; INTERFEROMETERS; INTERFEROMETRY; MACHINE TOOLS; MILLING MACHINES; MIRRORS; PROCESS CONTROL; QUALITY CONTROL; SPATIAL VARIABLES MEASUREMENT; SURFACE MEASUREMENT;

DIAMETER MEASUREMENT; OPTICAL DELAY LINE SCANNER; SHAPE MEASUREMENT; WHITE-LIGHT INTERFEROMETRY;

OPTICAL SENSORS;

EID: 0141831814     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.501072     Document Type: Conference Paper

References (16)

1. F. Chen, G. M. Brown, M. Song, "Overview of three-dimensional shape measurement using optical methods", Opt. Eng. 39, 10-22 (2000).
2. D. J. Whitehouse, "Surface metrology", Meas. Sci. 8, 955-971 (1997).
3. J. C. Wyant, "Optical profilers for surface roughness", Proc. SPIE 525, 174-180 (1985).
4. B. S. Lee and T. C. Strand, "Profilometry with a coherence scanning microscope", Appl. Opt. 29, 3784-3788 (1990).
5. T. Dresel, G. Häusler, and H. Venzke, "Three-dimensional sensing of rough surfaces with the coherence radar", Appl. Opt. 7, 919-925 (1992).
6. P. J. Caber, "Interferometric profiler for rough surfaces", Appl. Opt. 19, 3438-3441 (1993).
7. A. Olszak, "Lateral scanning white light interferometer", Appl. Opt. 39, 3906-3913 (2000).
8. D. J. Aziz, "Interferometric measurement of surface roughness in engine cylinder walls", Opt. Eng. 37, 1429-1434 (1998).
9. R. Windecker, "High resolution optical sensor for the inspection of engine cylinder walls", Optik 112, 407-412 (2001).
10. S. Franz, K. Leonhardt, R. Windecker, H. J. Tiziani, "Topograph for inspection of engine cylinder walls", Appl. Opt. 38, 7375-7381 (1999).
11. T. Dresel, S. Brinkman, R. Schreiner, and J. Schwider, "Testing of rod objects by gracing incidence interferometry: theory", J. opt. Soc. Am. A 15, 2921-2928 (1998).
12. K. Leonhardt, U. Droste, and H. J. Tiziani, "Microshape and rough-surface analysis by fringe projection", Appl. Opt. 33, 7477-7488 (1994).
13. M. Minsky, "Microscopy Apparatus", U.S. patent 3013467 (1957).
14. D. K. Hamilton, T. Wilson, and C. J. R. Sheppard, "Experimental observation of the depth-discrimination properties of scanning microscopes", Opt. Lett. 6, 625-626 (1981).
15. R. Windecker, M. Fleischer, and H. J. Tiziani, "Low-coherence fiber-optic sensor with a large numerical apertur for topographic measurements", Appl. Opt. 37, 4080-4083 (1998).
16. M. Fleischer, R. Windecker, and H. J. Tiziani, "Theoretical limits of scanning white-light interferometric signal evaluation algorithms", Appl. Opt. 40, 2815-2820 (2001).