Broadband multilayer mirrors for optimum use of soft X-ray source output

Journal of Optics A: Pure and Applied Optics

Volumn 2, Issue 5, 2000, Pages 452-457

  Wang, Z ^a,b   Michette, A G ^a  

^a KING'S COLLEGE LONDON   (United Kingdom)

^b CHANGCHUN INSTITUTE OF OPTICS   (China)

Author keywords

[No Author keywords available]

Indexed keywords

EMISSION SPECTROSCOPY; GRADIENT INDEX OPTICS; OPTICAL MULTILAYERS; REFLECTION; SPECTRUM ANALYSIS; X RAY SPECTROSCOPY;

BROADBAND X RAY OPTICS; DEPTH-GRADED MULTILAYER MIRRORS;

MIRRORS;

EID: 0034272137     PISSN: 14644258     EISSN: None     Source Type: Journal    
DOI: 10.1088/1464-4258/2/5/317     Document Type: Article

References (5)

1. Wang Z, Cao J and Michette A G 2000 Depth-graded multilayer x-ray optics with broad angular response Opt. Commun. 177 25-32
2. Michette A G and Wang Z 2000 Optimisation of depth-graded multilayer coatings for broadband reflectivity in the soft x-ray and EUV regions Opt. Commun. 177 47-55
3. Stuik R 1999 Private communication
4. Shevelko A P, Shmaenok L A, Churilov S S, Bastiaensen R K F J and Bijkerk F 1998 Extreme ultraviolet spectroscopy of a laser plasma source for lithography Phys. Scr. 57 276-82
5. Stuik R, Shmaenok L A, Fledderus H, Andreev S S, Shamov E A, Zuev S Y, Salashchenko N N and Bijkerk F 1999 Development of low-energy x-ray fluorescence micro distribution analysis using a laser plasma x-ray source and multilayer optics J. Anal. At. Spectrosc. 14 387-90