Cubic-(1 1 1) oriented growth of Zn1-xMgxO thin films on glass by DC reactive magnetron sputtering

Journal of Crystal Growth

Volumn 258, Issue 3-4, 2003, Pages 310-317

  Fang, Guo Jia ^a,b   Li, Dejie ^a   Yao, Bao Lun ^a   Zhao, Xinzhong ^b  

^a TSINGHUA UNIVERSITY   (China)

^b WUHAN UNIVERSITY   (China)

Author keywords

A1. Crystal structure; A3. Polycrystalline deposition; B1. Oxides; B2. Dielectric materials; B2. Semiconducting II VI materials

Indexed keywords

COMPOSITE MATERIALS; CRYSTAL STRUCTURE; DIELECTRIC MATERIALS; ENERGY GAP; FILM GROWTH; GLASS; MAGNESIA; MAGNETRON SPUTTERING; POLYCRYSTALLINE MATERIALS; THERMAL EFFECTS; ZINC COMPOUNDS;

POLYCRYSTALLINE DEPOSITION;

THIN FILMS;

EID: 0141819052     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-0248(03)01505-7     Document Type: Article

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