Preparation of MgO thin films by ion-plating method

Journal of the Ceramic Society of Japan

Volumn 110, Issue 1279, 2002, Pages 204-207

  Akira, Katou ^a   Hiroshi, Kajiyama ^a   Ken ich, Onisawa ^a   Tetsurou, Minemura ^a   Kazuo, Uetani ^b   Takanobu, Hori ^b   Yasushi, Ihara ^b  

^a HITACHI LTD   (Japan)

^b ShinMaywa Industries Ltd

Author keywords

Ion plating; Magnesium oxide; Protective layer; Thin film

Indexed keywords

ATOMIC FORCE MICROSCOPY; ELECTRON BEAMS; FILM GROWTH; IONS; MAGNESIA; PLASMA DISPLAY DEVICES; PLATING; PROTECTIVE COATINGS; SCANNING ELECTRON MICROSCOPY;

ION PLATING;

THIN FILMS;

EID: 0036503252     PISSN: 09145400     EISSN: None     Source Type: Journal    
DOI: 10.2109/jcersj.110.204     Document Type: Article

References (9)