Defect-deformational self-organization and nanostructuring of solid surfaces

Microelectronic Engineering

Volumn 69, Issue 2-4, 2003, Pages 435-445

  Emel'yanov, V I ^a  

^a MOSCOW STATE UNIVERSITY   (Russian Federation)

Author keywords

Defect deformational self organization; Deposition; Etching; Recrystallization; Structuring of solid surfaces

Indexed keywords

AMORPHOUS FILMS; ATOMIC FORCE MICROSCOPY; CRYSTALLIZATION; FOURIER TRANSFORMS; LASER PULSES; NANOSTRUCTURED MATERIALS; SCANNING ELECTRON MICROSCOPY; TRANSMISSION ELECTRON MICROSCOPY; ULTRAVIOLET RADIATION;

SOLID SURFACES;

MICROELECTRONIC PROCESSING;

EID: 0141791619     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(03)00332-0     Document Type: Conference Paper

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