Quasi-one-dimensional distribution of macropores in anodically etched uniaxially stressed silicon plates

Technical Physics Letters

Volumn 29, Issue 3, 2003, Pages 226-229

  Emel'yanov V I ^a,b   Eremin, K I ^a,b   Starkov, V V ^a,b   Gavrilin, E Yu ^a,b  

^a MOSCOW STATE UNIVERSITY   (Russian Federation)

^b INSTITUTE OF MICROELECTRONICS TECHNOLOGY AND HIGH PURITY MATERIALS   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0037363154     PISSN: 10637850     EISSN: None     Source Type: Journal    
DOI: 10.1134/1.1565641     Document Type: Article

References (16)

1. A. G. Cullis, L. T. Canham, and P. D. J. Calcott, J. Appl. Phys. 82, 909 (1997).
2. D. Kovalev, H. Hackler, G. Polisski, and F. Koch, Phys. Status Solidi B 215, 817 (1999).
3. L. A. Golovan, V. Yu. Timoshenko, A. B. Fedotov, et al., Appl. Phys. B 73, 31 (2001).
4. C. Levi-Clement and S. Bastide, Z. Phys. Chem. (Munich) 212, 123 (1999).
5. R. Angelucci, A. Poggi, L. Dori, et al., Sens. Actuators A 74, 1 (1999).
6. C. M. A. Ashruf, P. J. French, P. M. Sarro, et al., J. Micromech. Microeng. 10, 505 (2000).
7. I. Mizishima, T. Sato, S. Taniguchi, et al., Appl. Phys. Lett. 77, 3290 (2000).
8. A. Chelnokov, K. Wang, S. Rowson, et al., Appl. Phys. Lett. 77, 2943 (2000).
9. F. Miller, A. Birner, U. Cosele, et al., J. Por. Mater. 7, 201 (2000).
10. L. A. Golovan', A. B. Fedotov, P. K. Kashkarov, et al., Pis'ma Zh. Éksp. Teor. Fiz. 69, 274 (1999) [JETP Lett. 69, 300 (1999)].
11. V. I. Emel'yanov, K. I. Eremin, and V. V. Starkov, Kvantovaya Elektron. (Moscow) 32, 473 (2002).
12. V. I. Emel'yanov, Kvantovaya Élektron. (Moscow) 28, 2 (1999).
13. D. Walgraef, N. M. Ghoniem, and J. Lauzeral, Phys. Rev. B 56, 15361 (1997).
14. V. I. Emel'yanov, Laser Phys. 2, 389 (1992).
15. M. J. Aziz, Defect Diffusion Forum 153, 1 (1998).
16. S. A. Ambartsumyan, Theory of Anisotropic Plates (Nauka, Moscow, 1967).