Field emission induced fabrication of nanostructures on Au thin films using a noncontact mode atomic force microscope

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 21, Issue 4, 2003, Pages 1357-1360

  Park, Kang Ho ^a   Kim, Jeongyong ^b   Ha, Jeong Sook ^c   Song, Ki Bong ^a  

^a Electronics and Telecommunications Research Institute (ETRI)   (South Korea)

^b SolarLight Ltd   (South Korea)

^c Korea University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; DIFFUSION IN SOLIDS; ELECTRON EMISSION; GOLD; MASS TRANSFER; NANOSTRUCTURED MATERIALS; THERMAL CONDUCTIVITY;

BIAS VOLTAGES;

THIN FILMS;

EID: 0141681317     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1587138     Document Type: Conference Paper

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