Fabrication of high-temperature superconductor Josephson junctions by focused ion beam milling

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 15, Issue 6, 1997, Pages 2379-2381

  Chen, C H ^a   Trajanovic, Z ^a   Dong, Z W ^a   Lobb, C J ^a   Venkatesan, T ^a   Edinger, K ^a   Orloff, J ^a   Melngailis, J ^a  

^a UNIVERSITY OF MARYLAND   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FABRICATION; HIGH TEMPERATURE SUPERCONDUCTORS; ION BEAMS; MODULATION; OXIDE SUPERCONDUCTORS; SQUIDS; SUPERCONDUCTING FILMS; SUPERCONDUCTIVITY; YTTRIUM COMPOUNDS;

FOCUSED ION BEAM MILLING; HIGH CRITICAL TEMPERATURE JOSEPHSON JUNCTIONS;

JOSEPHSON JUNCTION DEVICES;

EID: 0031275481     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.589651     Document Type: Article

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