Thermal stability of microhardness and internal stress of hard a-C films with predominantly sp2 bonds

Diamond and Related Materials

Volumn 12, Issue 8, 2003, Pages 1378-1384

  Kulikovsky, V ^a,b   Vorlicek V ^a   Bohac P ^a   Kurdyumov, A ^b   Deyneka, A ^a   Jastrabik L ^a  

^a INSTITUTE OF PHYSICS   (Czech Republic)

^b FRANTSEVICH INSTITUTE FOR PROBLEMS OF MATERIALS SCIENCE   (Ukraine)

Author keywords

Diamond like carbon; Mechanical properties; Sputtering; Thermal stability

Indexed keywords

ANNEALING; MICROHARDNESS; NANOSTRUCTURED MATERIALS; RAMAN SCATTERING; RESIDUAL STRESSES; THERMODYNAMIC STABILITY;

OPTICAL SPECTRA;

THIN FILMS;

DIAMOND;

EID: 0043124617     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-9635(03)00107-9     Document Type: Article

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