Numerical investigation of silicon melt flow in large diameter CZ-crystal growth under the influence of steady and dynamic magnetic fields

Journal of Crystal Growth

Volumn 230, Issue 1-2, 2001, Pages 92-99

  Virbulis, J ^a   Wetzel, Th ^b   Muiznieks, A ^b   Hanna, B ^a   Dornberger, E ^a   Tomzig, E ^a   Muhlbauer A ^b   Ammon, W V ^a  

^a SILTRONIC AG   (Germany)

^b LEIBNIZ UNIVERSITY HANNOVER   (Germany)

Author keywords

A1. Fluid flows; A1. Heat transfer; A1. Magnetic fields; A2. Czochralski method; B2. Semiconducting silicon

Indexed keywords

COMPUTATIONAL FLUID DYNAMICS; COMPUTER SIMULATION; HEAT TRANSFER; MAGNETIC FIELD EFFECTS; MATHEMATICAL MODELS; SEMICONDUCTING SILICON;

MELT FLOW;

CRYSTAL GROWTH FROM MELT;

EID: 0035426550     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-0248(01)01321-5     Document Type: Conference Paper

References (17)