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Journal of Applied Physics

Volumn 94, Issue 4, 2003, Pages 2199-2202

Characterization of BCl3/N2 plasmas

(2) Nordheden, Karen J a Sia, Joanne F a

a University of Kansas (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; CARRIER CONCENTRATION; DISSOCIATION; EMISSION SPECTROSCOPY; ENERGY TRANSFER; MASS SPECTROMETRY; NITROGEN; SEMICONDUCTING BORON; SEMICONDUCTING GALLIUM ARSENIDE;

OPTICAL EMISSION SPECTROSCOPY (OES);

INDUCTIVELY COUPLED PLASMA;

EID: 0042925374 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.1591075 Document Type: Article

Times cited : (18)

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