Thermal measurement and analysis of micro devices using thermography

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5058, Issue , 2003, Pages 502-510

  Gu, Y Q ^a   Zhang, R H ^a   Zhu, D Z ^a  

^a TSINGHUA UNIVERSITY   (China)

Author keywords

Accelerometer; Gas sensor; Infrared thermography; Micro pump; Temperature

Indexed keywords

ACCELEROMETERS; CHEMICAL SENSORS; OPTIMIZATION; PUMPS; THERMAL EXPANSION; THERMOGRAPHY (TEMPERATURE MEASUREMENT);

INFRARED THERMOGRAPHY;

MICROELECTROMECHANICAL DEVICES;

EID: 0042858578     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.509876     Document Type: Conference Paper

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