The design of a new integrated gas sensor array based on FEA

Sensors and Actuators, B: Chemical

Volumn 66, Issue 1, 2000, Pages 66-69

  Ping, Wang ^a   Liping, Kong ^a   Xiaoxiang, Wang ^a   Jianping, Li ^b  

^a ZHEJIANG UNIVERSITY   (China)

^b INSTITUTE OF ELECTRONICS   (China)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; FINITE ELEMENT METHOD; MICROPROCESSOR CHIPS; MICROSTRUCTURE; SEMICONDUCTOR DEVICE MODELS; STATISTICAL METHODS;

GAS SENSOR CHIPS; MICROSTRUCTURE GAS SENSOR ARRAYS;

CHEMICAL SENSORS;

EID: 0033724159     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-4005(99)00399-8     Document Type: Article

References (4)

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2. Volklein F., Balters H. Optimization tool for the performance parameters of thermoelectric microsensors. Sens. Actuators, B. 36:1993;65-71.
3. Samuel K., Fung H. Thermal analysis and design of micro-hotplate for integrated gas sensor application. Transducers ’95, Stockholm, Sweden, June 25-29:1995;818-821.
4. Thornton H. Finite Element Method. 1990;World Book Publishing.