An integrated gas sensor technology using surface micro-machining

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2001, Pages 543-546

  Chan, P C H ^a   Yan, G Z ^a   Sheng, L Y ^a   Sharma, R K ^a   Tang, Z ^a   Sin, J K O ^a   Hsing, I M ^a   Wang, Y ^a  

^a HONG KONG UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Hong Kong)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON MONOXIDE; MICROMACHINING; PHOTOLITHOGRAPHY; RESIDUAL STRESSES; SCANNING ELECTRON MICROSCOPY; SILICON SENSORS; STIFFNESS;

SURFACE MICRO-MACHINING;

CHEMICAL SENSORS;

EID: 0034998699     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)