Thermal measurement and analysis of micro hotplate array using thermography

Sensors and Actuators, A: Physical

Volumn 100, Issue 2-3, 2002, Pages 144-152

  Zhang, Ronghai ^a   Gu, Yuqin ^a   Zhu, Dezhong ^a   Hao, Jingyang ^a   Tang, Zhenan ^b  

^a TSINGHUA UNIVERSITY   (China)

^b DALIAN UNIVERSITY OF TECHNOLOGY   (China)

Author keywords

Infrared thermography; Micro hotplate array; Micro sensor; Temperature distribution

Indexed keywords

ARRAYS; HIGH TEMPERATURE EFFECTS; INFRARED RADIATION; MICROPROCESSOR CHIPS; TEMPERATURE DISTRIBUTION; THERMOGRAPHY (TEMPERATURE MEASUREMENT);

MICRO HOTPLATE (MHP) ARRAYS;

MICROSENSORS;

EID: 0036725077     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(02)00061-4     Document Type: Article

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