Processable high carbon-yielding polymer for micro- and nanofabrication

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4979, Issue , 2003, Pages 307-316

  Perpall, Mark W ^a   Zengin, Huseyin ^a   Perera, K Prasanna U ^a   Zhou, Wensheng ^a   Shah, Hiren ^a,c   Wu, Xinyu ^a   Creager, Stephen E ^a   Smith Jr , Dennis W ^a   Foulger, Stephen H ^b   Ballato, John ^b  

^a CLEMSON UNIVERSITY   (United States)

^b South   (United States)

^c JDS UNIPHASE   (United States)

Author keywords

Bis ortho diynyl arene (BODA); Inverse carbon opal; Micro transfer molding; Photonic crystal; Processable carbon precursor polymer

Indexed keywords

FORMALDEHYDE; HEATING; MOLDING; MONOMERS; PHENOLS; POLYMERIZATION; REFRACTIVE INDEX;

BIORTHODIYNYL ARENE; INVERSE CARBON OPAL; MICROTRANSFER MOLDING; PHOTONIC CRYSTAL; PROCESSABLE CARBON PRECURSOR POLYMER;

MICROMACHINING;

EID: 0042563424     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.478252     Document Type: Conference Paper

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