-
1
-
-
0033693245
-
IC-compatible polysilicon surface micromachining
-
Sniegowski, J. J; deBoer, M. P., "IC-Compatible polysilicon surface micromachining", Annu. Rev. Mater. Sci. 30, 299-333, 2000.
-
(2000)
Annu. Rev. Mater. Sci.
, vol.30
, pp. 299-333
-
-
Sniegowski, J.J.1
DeBoer, M.P.2
-
2
-
-
0000001239
-
Materials of LIGA technology
-
Ehrfeld, W. et al, "Materials of LIGA technology", Microsystem Technologies, 5, 105-112, 1999.
-
(1999)
Microsystem Technologies
, vol.5
, pp. 105-112
-
-
Ehrfeld, W.1
-
3
-
-
0000518739
-
LIGA technologies and applications
-
Hruby, J., "LIGA technologies and applications", MRS Bulletin, 26 (4), 337-340, 2001.
-
(2001)
MRS Bulletin
, vol.26
, Issue.4
, pp. 337-340
-
-
Hruby, J.1
-
4
-
-
0036575556
-
Production of metallic high aspect ratio microstructures by microcasting
-
Baumeister, G. et al, "Production of metallic high aspect ratio microstructures by microcasting", Microsystem Technologies, 8, 105-108, 2002.
-
(2002)
Microsystem Technologies
, vol.8
, pp. 105-108
-
-
Baumeister, G.1
-
5
-
-
0002138357
-
Microfabrication of ceramic microreactors
-
Knitter, R. et al, "Microfabrication of ceramic microreactors", Microsystem Technologies 7, 85-90, 2001.
-
(2001)
Microsystem Technologies
, vol.7
, pp. 85-90
-
-
Knitter, R.1
-
6
-
-
0035131680
-
Fabrication of high performance ceramic microstructures from a polymeric precursor using soft lithography
-
Yang, H. et al, "Fabrication of high performance ceramic microstructures from a polymeric precursor using soft lithography", Advanced Materials 13 (1), 54 - 58, 2001.
-
(2001)
Advanced Materials
, vol.13
, Issue.1
, pp. 54-58
-
-
Yang, H.1
-
7
-
-
0035353764
-
Ceramic MEMS: New materials, innovative processing and future applications
-
Liew, L. A. et al, "Ceramic MEMS: new materials, innovative processing and future applications", American Ceramic Society Bulletin, 80 (5), 25 - 30, 2001.
-
(2001)
American Ceramic Society Bulletin
, vol.80
, Issue.5
, pp. 25-30
-
-
Liew, L.A.1
-
8
-
-
4243458976
-
Fabrication of ceramic microstructures from polymer compositions containing nanoparticles
-
United States Patent 6 245 849 B1
-
Morales, A. M.; Zhang, Z. J.; Chinn, D., "Fabrication of ceramic microstructures from polymer compositions containing nanoparticles", United States Patent 6 245 849 B1, 2001
-
(2001)
-
-
Morales, A.M.1
Zhang, Z.J.2
Chinn, D.3
-
9
-
-
4244059890
-
Fabrication of metallic microstructures by micromolding nanoparticles
-
United States Patent 6 472 459 B2
-
Morales, A. M. et al, "Fabrication of metallic microstructures by micromolding nanoparticles", United States Patent 6 472 459 B2, 2002.
-
(2002)
-
-
Morales, A.M.1
-
10
-
-
0036351577
-
The fabrication of stainless steel parts for MEMS
-
Garino, T. J. et al; "The fabrication of stainless steel parts for MEMS", Materials Research Society Proceedings, 687, 149-154, 2002.
-
(2002)
Materials Research Society Proceedings
, vol.687
, pp. 149-154
-
-
Garino, T.J.1
-
11
-
-
0033319804
-
LIGA: Metals, plastics, and ceramics
-
Hruby, J. M. et al, "LIGA: metals, plastics, and ceramics", SPIE Proceedings, 3874, 32-43, 1999.
-
(1999)
SPIE Proceedings
, vol.3874
, pp. 32-43
-
-
Hruby, J.M.1
-
12
-
-
0042480098
-
-
http://sandialiga.org
-
-
-
-
13
-
-
0042981003
-
-
Nalwa, H. S., ed.; Academic Press, San Diego, CA
-
Nalwa, H. S., ed.; Nanostructured Materials and Nanotechnology, 93-95, Academic Press, San Diego, CA, 2002.
-
(2002)
Nanostructured Materials and Nanotechnology
, pp. 93-95
-
-
-
14
-
-
0041478279
-
-
Disperbyk technical data sheet
-
Disperbyk technical data sheet, http://www.byk-chemie.com/download/w8-gb.pdf
-
-
-
-
16
-
-
0031555724
-
Imbibition and flow of wetting liquids in noncircular capillaries
-
Kim, E.; Whitesides, G. M., "Imbibition and flow of wetting liquids in noncircular capillaries", Journal of Physical Chemistry B, 101 (6), 855-863, 1997.
-
(1997)
Journal of Physical Chemistry B
, vol.101
, Issue.6
, pp. 855-863
-
-
Kim, E.1
Whitesides, G.M.2
-
17
-
-
0042980999
-
-
Cubberly, W. H. ed.; American Society for Metals, Metals Park, OH
-
Cubberly, W. H. ed., Metals Handbook 9th edition 7, 397, American Society for Metals, Metals Park, OH, 1979.
-
(1979)
Metals Handbook 9th Edition
, vol.7
, pp. 397
-
-
-
18
-
-
0042981001
-
-
Cubberly, W. H. ed.; American Society for Metals, Metals Park, OH
-
Cubberly, W. H. ed., Metals Handbook 9th edition 2, 776, American Society for Metals, Metals Park, OH, 1979.
-
(1979)
Metals Handbook 9th Edition
, vol.2
, pp. 776
-
-
|