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Volumn 42, Issue 6 B, 2003, Pages

Thermal desorption behavior of AlF3 formed on Al 2O3

Author keywords

Aluminum fluoride; Aluminum subfluoride; Quadrupole mass spectrometer; Sublimation; Time of flight distribution

Indexed keywords

DESORPTION; MASS SPECTROMETRY; MOLECULAR BEAMS; SUBLIMATION;

THERMAL DESORPTION;

ALUMINA;

EID: 0042383456 PISSN: 00214922 EISSN: None Source Type: Journal
DOI: 10.1143/jjap.42.l680 Document Type: Article

Times cited : (3)

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