Toward standard method for microelectromechanical systems material measurement through on-chip electrostatic probing of micrometer size polysilicon tensile specimens

Japanese Journal of Applied Physics, Part 2: Letters

Volumn 40, Issue 2 A, 2001, Pages

  Minotti, P ^a   Le Moal, P ^a   Joseph, E ^a   Bourbon, G ^a  

^a UNIVERSITÉ DE FRANCHE COMTÉ   (France)

Author keywords

Monolithic tensile test; On chip mechanical characterization; Polysilicon fracture strength; Tensile strength

Indexed keywords

ACTUATORS; CHEMICAL VAPOR DEPOSITION; FRACTURE TOUGHNESS; POLYSILICON; TENSILE STRENGTH; TENSILE TESTING;

ON-CHIP ELECTROSTATIC PROBING;

MICROELECTROMECHANICAL DEVICES;

EID: 0035247564     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/JJAP.40.L120     Document Type: Article

References (11)