Fabrication of micromachined TiNi based microgripper with compliant structure

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5116 I, Issue , 2003, Pages 38-47

  Fu, Yongqing ^a,b   Du, Hejun ^a,b  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^b SINGAPORE MIT ALLIANCE   (Singapore)

Author keywords

Martensite transformation; Shape memory; Sputter deposition; TiNi thin film

Indexed keywords

FILMS; GRIPPERS; MARTENSITE; MICROACTUATORS; MICROMACHINING; SHAPE MEMORY EFFECT; SPUTTER DEPOSITION; STRUCTURAL DESIGN;

ACTUATION DISPLACEMENT; COMPLIANT STRUCTURE; MICROGRIPPER;

TITANIUM NITRIDE;

EID: 0042329605     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.498184     Document Type: Conference Paper

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