A low-loss Ka-band distributed MEMS 2-bit phase shifter using metal-air-metal capacitors

IEEE MTT-S International Microwave Symposium Digest

Volumn 1, Issue , 2002, Pages 337-340

  Hayden, Joseph S ^a   Rebeiz, Gabriel M ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITORS; FREQUENCIES; INSERTION LOSSES; MICROELECTROMECHANICAL DEVICES; REFLECTION; SWITCHING SYSTEMS; VOLTAGE MEASUREMENT;

FRINGING CAPACITANCE; METAL-AIR-METAL CAPACITORS;

PHASE SHIFTERS;

EID: 0036075745     PISSN: 0149645X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)

1. 2-bit MEMS distributed X-band phase shifters
2. 2 and 4-bit DC-18 GHz microstrip MEMS distributed phase shifters
3. Optimization of distributed MEMS transmission-line phase shifters - U-band and W-band design
4. Ka-band RF MEMS phase shifters
5. V-band low-loss and low-voltage distributed MEMS digital phase shifter using metal-air-metal capacitors
6. Distributed MEMS transmission lines