V-band low-loss and low-voltage distributed MEMS digital phase shifter using metal-air-metal capacitors

IEEE MTT-S International Microwave Symposium Digest

Volumn 1, Issue , 2002, Pages 341-344

  Kim, Hong Teuk ^a   Park, Jae Hyoung ^a   Kim, Yong Kweon ^a   Kwon, Youngwoo ^a  

^a Seoul National University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITORS; DIELECTRIC LOSSES; ELECTRIC INDUCTORS; FREQUENCIES; INSERTION LOSSES; VOLTAGE DISTRIBUTION MEASUREMENT;

CHOKE SPIRAL INDUCTORS; METAL-AIR-METAL CAPACITORS;

PHASE SHIFTERS;

EID: 0036073183     PISSN: 0149645X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (11)

1. Optimization of distributed MEMS transmission-line phase shifters - U-band and W-band designs
2. Low-loss distributed MEMS phase shifter
3. 2-bit MEMS distributed X-band phase shifters
4. K-band 3-bit low-loss distributed MEMS phase shifter
5. 2 and 4-bit DC-18 GHz microstrip MEMS distributed phase shifters
6. Ka-band RF MEMS phase shifters
7. A DC-to-40 GHz four-bit RF MEMS true-time delay network
8. X-band RF MEMS phase shifters for phased array applications
9. Compact low-loss monolithic CPW filters using air-gap overlay structures
10. A low-loss Ka-band distributed MEMS 2-bit phase shifter using metal-air-metal capacitors
11. A micromachined millimeter wave phase shifter using semi-lumped elements