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Volumn 94, Issue 2, 2003, Pages 1043-1049

Synthesis of GaNxAs1-x thin films by pulsed laser melting and rapid thermal annealing of N+-implanted GaAs

Author keywords

[No Author keywords available]

Indexed keywords

EPITAXIAL GROWTH; ION IMPLANTATION; MELTING; NITROGEN; OPTICAL PROPERTIES; PULSED LASER APPLICATIONS; RAPID THERMAL ANNEALING; SEMICONDUCTING GALLIUM COMPOUNDS; SYNTHESIS (CHEMICAL);

EID: 0042267275     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1582393     Document Type: Article
Times cited : (53)

References (30)
  • 2
    • 0043060991 scopus 로고    scopus 로고
    • Special Issue: III-N-V Semiconductor Alloys
    • See for example, Semiconductor Science and Technology Vol. 17, 2002, Special Issue: III-N-V Semiconductor Alloys.
    • (2002) Semiconductor Science and Technology , vol.17
  • 13
  • 24
    • 0043060988 scopus 로고
    • edited by J. M. Poate and J. W. Mayer (Academic, New York)
    • J. S. Williams, in Laser Annealing of Semiconductors, edited by J. M. Poate and J. W. Mayer (Academic, New York, 1982), p. 385.
    • (1982) Laser Annealing of Semiconductors , pp. 385
    • Williams, J.S.1
  • 30
    • 0042181124 scopus 로고    scopus 로고
    • Implant Sciences Corp. 107 Audubon Rd., #5, Wakefield. MA 01880
    • PROFILE, Ion Beam Profile Code version 3.20, Implant Sciences Corp. 107 Audubon Rd., #5, Wakefield. MA 01880.
    • PROFILE, Ion Beam Profile Code Version 3.20


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.