Nanosecond pulsed excimer laser machining of chemical vapour deposited diamond and highly oriented pyrolytic graphite: Part I An experimental investigation

Journal of Materials Science

Volumn 32, Issue 16, 1997, Pages 4295-4301

  Windholz, R ^a   Molian, P A ^a  

^a Iowa State University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; EXCIMER LASERS; GRAPHITE; LASER ABLATION; MACHINING; MICROANALYSIS; PHASE TRANSITIONS; POLISHING; RAMAN SPECTROSCOPY; SURFACE ROUGHNESS; THIN FILMS;

HIGHLY ORIENTED PYROLYTIC GRAPHITE (HOPG);

DIAMOND FILMS;

EID: 0031211088     PISSN: 00222461     EISSN: None     Source Type: Journal    
DOI: 10.1023/A:1018611604403     Document Type: Article

References (21)

1. H. D. GRESSER, Laser sawing of diamonds, Dearborn, MI, 1976. Technical Paper MR76-855 (Society of Manufacturing Engineers, Dearborn, MI, 1976) pp. 1-11.
2. J. WILKS and E. WILKES, "Properties and Applications of Diamond" (Courier International Ltd., Boston, MA, 1991).
3. M. ROTHSCHILD, C. ARNONE and D. J. EHRLICH, J. Vac. Sci. Technol. B 4 (1986) 310.
4. A. P. MALSHE, S. T. KSHIRSAGAR and K. S. CHARI, Mater. Lett. 11 (1991) 175.
5. A. HIRATA, H. TOKURA and M. YOSHIKAWA, in "Applications of Diamond Films and Related Materials", edited by Y. Tzeng (Elsevier, New York, 1991) pp. 227-232.
6. N. N. EFREMOW, M. W. GEIS, D. C. FLANDERS, G. A. LINCOLN and N. P. ECONOMOU, J. Vac. Sci. Technol. B 3 (1985) 416.
7. A. B. HARKER, in "Applications of Diamond Films and Related Materials", edited by Y. Tzeng (Elsevier, New York, 1991) pp. 223-225.
8. M. HASHISH and D. H. BOTHELL, in "Diamond Optics V", SPIE Vol. 1759, edited by A. Feldman and S. Holly (The Society of Photo-Optimal Instrumentation Engineers, Bellingham, WA, 1992) pp. 97-105.
9. M. B. MORAN, K. A. KLEMM and L. F. JOHNSON, in "Applications of Diamond Films and Related Materials", edited by Y. Tzeng (Elsevier, New York, 1991) p. 236.
10. S. JIN, J. E. GRAEBNER and T. H. TIEFEL, in "Diamond Optics V", SPIE Vol. 1759, edited by A. Feldman and S. Holly (The Society of Photo-Optimal Instrumentation Engineers, Bellingham, WA, 1992) pp. 57-67.
11. C. P. CHRISTENSEN, in "Lasers as Tools for Manufacturing", SPIE Vol. 2062, edited by L. Migliore and R. Walker (The Society of Photo-Optimal Instrumentation Engineers, Bellingham, WA, 1993) pp. 14-21.
12. Laser Energetics Inc. LEX-BDS-1000992 Beam Delivery System Laser Energetics Inc, Orlando, FL.
13. R. M. WHITE, J. Appl. Phys. 34 (1963) 3559.
14. R. BULLOUGH and J. J. GILMAN, ibid. 37 (1966) 2283.
15. D. BAUERLE, In "NATO ASI series E: applied sciences Vol. 265", Excimer Lasers, edited by L. Laude (Kluwer Academic Publishers, Boston, MA, 1994) p. 44.
16. V. P. AGEEV, L. L. BUILOV, V. I. KONOV, A. V. KUZMICHEV, S. M. PIMENOV and A. M. PROKHOROV, Dokl. Akad. Nauk SSSR 303 (1988) 598.
17. A. INAM, X. D. WU, T. VENKATESAN, S. B. OGALE, C. C. CHANG and D. DIJKKAMP, Appl. Phys. Lett. 51 (1987) 1112.
18. S. PRAWER, R. KALISH and M. ADEL, ibid. 48 (1986) 1585.
19. H. K. TONSHOFF and F. VON ALVENSLEBEN, in "Solid State Lasers IV", SPIE Vol. 1864, edited by G. Quarles and M. Woodhill (The Society of Photo-Optimal Instrumentation Engineers, Bellingham, WA, 1993) pp. 96-107.
20. T. V. KONONENKO, V. I. KONOV and V. G. RALCHENKO, in "Diamond Optics V", SPIE Vol. 1759, edited by A. Feldman and S. Holly (The Society of Photo-Optical Instrumentation Engineers, Bellingham, WA, 1992) pp. 106-114.
21. V. N. TOKAREV and V. I. KONOV, in "Applications of Diamond Films and Related Materials", edited by Y. Tzeng (Elsevier, New York, 1991) pp. 249-255.