Experimental resolution measurement in critical dimension scanning electron microscope metrology

Scanning

Volumn 25, Issue 4, 2003, Pages 175-180

  Lorusso, G F ^a   Joy, D C ^b,c  

^a KLA TENCOR CORPORATION   (United States)

^b UNIVERSITY OF TENNESSEE   (United States)

^c OAK RIDGE NATIONAL LABORATORY   (United States)

Author keywords

Correlation; Critical dimension metrology; Critical dimension scanning electron microscope; Fourier analysis

Indexed keywords

ALGORITHMS; MEASUREMENTS; SCANNING ELECTRON MICROSCOPY;

METROLOGY REQUIREMENTS;

OPTICAL RESOLVING POWER;

ACCURACY; ALGORITHM; ANALYTIC METHOD; ARTICLE; CALIBRATION; NOISE; OPTICAL RESOLUTION; PRIORITY JOURNAL; QUANTITATIVE ANALYSIS; SCANNING ELECTRON MICROSCOPY;

EID: 0042090709     PISSN: 01610457     EISSN: None     Source Type: Journal    
DOI: 10.1002/sca.4950250403     Document Type: Article

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