A study for the bias control of indium-tin-oxide films synthesized by cesium assisted radio frequency magnetron sputtering

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 21, Issue 4, 2003, Pages 1069-1072

  Lee, Deuk Yeon ^a   Lee, Se Jong ^b   Song, Kie Moon ^c   Baik, Hong Koo ^a  

^a Yonsei University   (South Korea)

^b Kyungsung University   (South Korea)

^c Konkuk University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

AUGER ELECTRON SPECTROSCOPY; CESIUM; CRYSTAL MICROSTRUCTURE; ELECTRIC CONDUCTIVITY OF SOLIDS; FILM GROWTH; MAGNETRON SPUTTERING; OPTICAL PROPERTIES; PLASMA APPLICATIONS; SEMICONDUCTING INDIUM COMPOUNDS; SUBSTRATES; THICKNESS MEASUREMENT; X RAY DIFFRACTION ANALYSIS;

CESIUM ASSISTED RADIO FREQUENCY MAGNETRON SPUTTERING; FILM THICKNESS; INDIUM TIN OXIDE FILM; LOW TEMPERATURE GROWTH;

THIN FILMS;

EID: 0042030910     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1584038     Document Type: Article

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