Field effect transducers for work function gas measurements: Device improvements and comparison of performance

Sensors and Actuators, B: Chemical

Volumn 95, Issue 1-3, 2003, Pages 183-188

  Burgmair, Markus ^a   Frerichs, H P ^b   Zimmer, Martin ^a   Lehmann, M ^b   Eisele, Ignaz ^a  

^a BUNDESWEHR UNIVERSITY MUNICH   (Germany)

^b Micronas GmbH Freiburg   (Germany)

Author keywords

Floating gate GasFET; Guard ring; HSGFET; Transducer sensitivity; Work function

Indexed keywords

ACTUATORS; ATMOSPHERIC HUMIDITY; CATALYSTS; GATES (TRANSISTOR); OPTIMIZATION; THIN FILMS; TRANSDUCERS;

CATALYTIC METALS;

CHEMICAL SENSORS;

EID: 0041733745     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-4005(03)00412-X     Document Type: Conference Paper

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