Gold and platinum as ozone sensitive layer in work-function gas sensors

Sensors and Actuators, B: Chemical

Volumn 80, Issue 3, 2001, Pages 174-178

  Zimmer, M ^a   Burgmair, M ^a   Scharnagl, K ^a   Karthigeyan, A ^a   Doll, T ^a   Eisele, I ^a  

^a BUNDESWEHR UNIVERSITY MUNICH   (Germany)

Author keywords

Gas sensor; Gold; Ozone detection; Platinum; Sensitive layer; Work function

Indexed keywords

FIELD EFFECT TRANSISTORS; GAS DETECTORS; GOLD; OZONE; PLATINUM; SENSITIVITY ANALYSIS; THERMAL EFFECTS;

HYBRID SUSPENDED GATE FIELD EFFECT TRANSISTOR (HSGFET) DEVICES; WORK-FUNCTION GAS SENSORS;

CHEMICAL SENSORS;

EID: 0035545717     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(01)00673-2     Document Type: Conference Paper

References (10)

1. Design and fabrication of HSGFET gas sensors
2. Reliable hybrid GASFETs for work-function measurements with arbitrary materials
3. Adsorption induced gas transport phenomena in narrow channels recorded with work-function detectors
4. Flip-chip mounting of hybrid FET gas sensors with air gap
5. Ozone detection in the ppb range with work-function sensors operating at room temperature
6. Room temperature ozone sensing with KI layers integrated in HSGFET gas sensors
7. Low power gas detection with FET sensors
8. Piezoelectrically driven Kelvin probe for contact potential studies
9. The work-function of gold