A room temperature HSGFET ammonia sensor based on iridium oxide thin film

Sensors and Actuators, B: Chemical

Volumn 85, Issue 1-2, 2002, Pages 145-153

  Karthigeyan, A ^a   Gupta, R P ^a   Scharnagl, K ^b   Burgmair, M ^b   Sharma, S K ^c   Eisele, I ^b  

^a CENTRAL ELECTRONICS ENGINEERING RESEARCH INSTITUTE   (India)

^b BUNDESWEHR UNIVERSITY MUNICH   (Germany)

^c MALAVIYA NATIONAL INSTITUTE OF TECHNOLOGY   (India)

Author keywords

Ammonia detection; HSGFET; Iridium oxide; Kelvin probe; Room temperature; Work function

Indexed keywords

AMMONIA; ATOMIC FORCE MICROSCOPY; IRIDIUM COMPOUNDS; MORPHOLOGY; PHASE COMPOSITION; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SCANNING ELECTRON MICROSCOPY; SINTERING; SPUTTER DEPOSITION; THIN FILMS; X RAY DIFFRACTION ANALYSIS;

KELVIN PROBE;

CHEMICAL SENSORS;

EID: 0037141789     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-4005(02)00073-4     Document Type: Article

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