The capacitively controlled field effect transistor (CCFET) as a new low power gas sensor

Sensors and Actuators, B: Chemical

Volumn 36, Issue 1-3, 1996, Pages 285-289

  Gergintschew, Zenko ^a   Kornetzky, Peter ^a   Schipanski, Dagmar ^a  

^a ILMENAU UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

CMOS technology; Field effect transistor; Gas sensor; Low power application

Indexed keywords

AMMONIA; CAPACITORS; CARBON INORGANIC COMPOUNDS; FIELD EFFECT TRANSISTORS; GALLIUM COMPOUNDS; HYDROGEN; PALLADIUM;

AIR GAP; CAPACITIVELY CONTROLLED FIELD EFFECT TRANSISTORS; GALLIUM OXIDE; LOW POWER GAS SENSORS;

CHEMICAL SENSORS;

EID: 0030257721     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-4005(97)80083-4     Document Type: Article

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