Adsorption induced gas transport phenomena in narrow air channels recorded with work function detectors

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 14, Issue 2, 1996, Pages 278-285

  Flietner, B ^a,b   Doll, T ^a   Lechner, J ^a   Eisele, I ^a  

^a BUNDESWEHR UNIVERSITY MUNICH   (Germany)

^b IBM   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHANNEL FLOW; CHEMICAL SENSORS; ELECTRODES; FIELD EFFECT TRANSISTORS; GAS ADSORPTION; PLATINUM; PROBES; TRANSPORT PROPERTIES;

ADSORPTION DEPENDENCE; AIR CHANNELS; GAS EXCHANGE; GAS TRANSPORT; HYBRID SUSPENDED GATE FIELD EFFECT TRANSISTORS; KELVIN PROBE; WORK FUNCTION DETECTORS;

GASES;

EID: 0030104435     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.579889     Document Type: Article

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