Surface roughness at the Si-SiO2 interfaces in fully depleted silicon-on-insulator inversion layers

Journal of Applied Physics

Volumn 86, Issue 12, 1999, Pages 6854-6863

  Gamiz F ^a   Roldan J B ^a   Lopez Villanueva J A ^a   Cartujo Cassinello, P ^a   Carceller, J E ^a  

^a UNIVERSITY OF GRANADA   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0041544861     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.371763     Document Type: Article

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