The Munich ion microprobe: Characteristics and prospect

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 210, Issue , 2003, Pages 6-13

  Dollinger, Günther ^a   Datzmann, Gerd ^a   Hauptner, Andreas ^a   Hertenberger, Ralf ^b   Körner, Hans Joachim ^a   Reichart, Patrick ^a   Volckaerts, Bart ^c  

^a TECHNICAL UNIVERSITY OF MUNICH   (Germany)

^b UNIVERSITY OF MUNICH   (Germany)

^c VRIJE UNIVERSITEIT BRUSSEL   (Belgium)

Author keywords

Hydrogen analysis; Irradiation techniques; Microbeam facilities

Indexed keywords

EMISSION SPECTROSCOPY; HEAVY IONS; HIGH RESOLUTION ELECTRON MICROSCOPY; HYDROGEN; ION BOMBARDMENT; NUCLEAR INSTRUMENTATION; PROTON BEAMS; RUTHERFORD BACKSCATTERING SPECTROSCOPY; X RAY ANALYSIS;

MICROBEAMS;

ION BEAMS;

EID: 0041512941     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(03)01001-2     Document Type: Conference Paper

References (24)

1. Ryan C.G., Jamieson D.N., Griffin W.L., Cripps G., Szymanski R. Nucl. Instr. and Meth. B. 181:2001;12.
2. Butz T., Flagmeyer R.-H., Heitmann J., Jamieson D.N., Legge G.J.F., Lehmann D., Reibetanz U., Reinert T., Seint A., Spemann D., Szymanski R., Tröger W., Vogt J., Zhu J. Nucl. Instr. and Meth. B. 161:2000;323.
3. Watt F., Osipowicz T., Choo T.F., Orlic I., Tang S.M. Nucl. Instr. and Meth. B. 136:1998;313.
4. Jamieson D.N., Breese M.B.H., Saint A. Nucl. Instr. and Meth. B. 85:1994;676.
5. Grime G.W., Dawson M., Marsh M., McArthur I.C., Watt F. Nucl. Instr. and Meth. B. 54:1991;52.
6. Fischer B.E., Schlögl M., Barak J., Adler E., Metzger S. Nucl. Instr. and Meth. B. 158:1999;245.
7. Doyle B.L., Vizkelethy G., Walsh D.S., Senftinger B., Mellon M. Nucl. Instr. and Meth. B. 158:1999;6.
8. B.E. Fischer et al., these Proceedings. Nucl. Instr. and Meth. B. doi:10.1016/S0168-583X(03)01038-3.
9. Y. Kobayashi et al., these Proceedings. Nucl. Instr. and Meth. B. doi:10.1016/S0168-583X(03)01047-4.
10. Hinderer G., Dollinger G., Datzmann G., Körner H.-J. Nucl. Instr. and Meth. B. 130:1997;51.
11. Datzmann G., Dollinger G., Goeden C., Hauptner A., Körner H.-J., Reichart P., Schmelmer O. Nucl. Instr. and Meth. B. 181:2001;20.
12. Schmelmer O., Dollinger G., Datzmann G., Goeden C., Körner H.-J. Nucl. Instr. and Meth. B. 158:1999;107.
13. Datzmann G., Dollinger G., Hinderer G., Körner H.-J. Nucl. Instr. and Meth. B. 158:1999;74.
14. Ziegler J.F., Biersack J.P., Liimark U. The Stopping and Range of Ions in Solids. Vol. 1:1985;Pergammon, New York.
15. Toulemonde M., Paumier E., Dufour C. Radiat. Eff. Def. Solids. 126:1993;201.
16. Lesueur D., Dunlop A. Radiat. Eff. Def. Solids. 126:1993;163.
17. Denker A., Maier K.H. Nucl. Instr. and Meth. B. 150:1999;118.
18. Schmelmer O., Dollinger G., Datzmann G., Hauptner A., Körner H.-J., Maier-Komor P., Reichart P. Nucl. Instr. and Meth. B. 179:2001;469.
19. Ishii K., Morita S. Nucl. Instr. and Meth. B. 34:1988;209.
20. Reichart P., Dollinger G., Bergmaier A., Datzmann G., Hauptner A., Körner H.-J. Nucl. Instr. and Meth. B. 197:2002;134.
21. P. Reichart, G. Dollinger, G. Datzmann, A. Hauptner, R. Hertenberger, H.-J. Körner, Nucl. Instr. and Meth. B, doi:10.1016/S0168-583X(03)-01084-X.
22. Bench G.S., Legge G.J.F. Nucl. Instr. and Meth. B. 40-41:1989;655.
23. Pontau A.E., Antolak A.J., Morse D.H., ver Berkmoes A.A., Brase J.M., Heikkinen D.W., Martz H.E., Proctor I.D. Nucl. Instr. and Meth. B. 40-41:1989;646.
24. Volckaerts B., Ottevaere H., Vynck P., Debaes C., Tuteleers P., Hermanne A., Veretennicoff I., Thienpont H. Asian J. Phys. 10(2):2001;195.