A novel high precision slit system

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 158, Issue 1-4, 1999, Pages 107-112

  Schmelmer, O ^a   Dollinger, G ^a   Datzmann, G ^a   Goeden, C ^a   Korner H J ^a  

^a TECHNICAL UNIVERSITY OF MUNICH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

PARTICLE ACCELERATORS; PARTICLE BEAM DYNAMICS; PROBES; SEMICONDUCTING GERMANIUM;

NANOPROBES;

ION BEAMS;

EID: 0033350746     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(99)00357-2     Document Type: Article

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5. J.F. Ziegler, TRIM 96, Ziegler@Watson.IBM.Com.
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