Growth and characterisation of boron nitride films: Layer sequence and phase identification

Diamond and Related Materials

Volumn 6, Issue 5-7, 1997, Pages 594-598

  Plass, M F ^a   Fukarek, W ^a   Kolitsch, A ^a   Moller W ^a  

^a INSTITUTE OF ION BEAM PHYSICS AND MATERIALS RESEARCH   (Germany)

Author keywords

BN phases; Growth; Infrared; Ion assisted deposition; Modeling

Indexed keywords

EID: 0040211840     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0925-9635(96)00644-9     Document Type: Article

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