Vacancy-gettering in silicon: Cavities and helium-implantation

Solid State Phenomena

Volumn 69, Issue , 1999, Pages 229-233

  Corni, F ^a   Tonini, R ^a   Frabboni, S ^a   Nobili, C ^a   Calzolari, G ^a   Masetti, S ^a   Tamarozzi, P ^a   Pavia, G ^b   Cerofolini, G F ^b  

^a UNIVERSITY OF MODENA AND REGGIO EMILIA   (Italy)

^b STMICROELECTRONICS   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTALLINE MATERIALS; HELIUM; ION IMPLANTATION;

VACANCY-GETTERING;

SEMICONDUCTING SILICON;

EID: 0032659648     PISSN: 10120394     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.4028/www.scientific.net/ssp.69-70.229     Document Type: Article

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