메뉴 건너뛰기




Volumn 26, Issue 1, 2003, Pages 245-254

CrCu based UBM (under bump metallization) study with electroplated Pb/63Sn solder bumps - Interfacial reaction and bump shear strength

Author keywords

Bump shear test; Electroplating; Flip chip; IMC; Pb 63Sn solder; UBM

Indexed keywords

CHROMIUM COMPOUNDS; ELECTROPLATING; FLIP CHIP DEVICES; INTERFACES (MATERIALS); INTERMETALLICS; METALLIZING; SHEAR STRENGTH; SOLDERING; SPUTTERING; SURFACE TENSION;

EID: 0038819078     PISSN: 15213331     EISSN: None     Source Type: Journal    
DOI: 10.1109/TCAPT.2002.807591     Document Type: Article
Times cited : (23)

References (21)
  • 3
    • 0029404057 scopus 로고
    • Electrochemical fabrication of mechannically rodust PbSn C4 interconnections
    • M. Datta et al. "Electrochemical fabrication of mechannically rodust PbSn C4 interconnections," J. Electrochem. Soc., vol. 142, no. 11, p. 3779, 1995.
    • (1995) J. Electrochem. Soc. , vol.142 , Issue.11 , pp. 3779
    • Datta, M.1
  • 4
    • 24444463165 scopus 로고    scopus 로고
    • Electroetching method and apparatus
    • U.S. patent 5 543 032, Aug.
    • M. Datta and R. Shenoy, "Electroetching Method and Apparatus," U.S. patent 5 543 032, Aug. 1996.
    • (1996)
    • Datta, M.1    Shenoy, R.2
  • 5
    • 0030197114 scopus 로고    scopus 로고
    • High Sn solder reaction with Cu metallization
    • T. Liu, D. Kim, D. Leung, M. A. Korhenen, and C.-Y. Li, "High Sn solder reaction with Cu metallization," Scripta Mater., vol. 35, no. 1, p. 65, 1996.
    • (1996) Scripta Mater. , vol.35 , Issue.1 , pp. 65
    • Liu, T.1    Kim, D.2    Leung, D.3    Korhenen, M.A.4    Li, C.-Y.5
  • 6
    • 0001514053 scopus 로고    scopus 로고
    • Microstructures of phased-in Cr-Cu/Cu/Au bump-limiting metallization and its behavior with high Pb content and eutectic PbSn solders
    • G. Z. Pan, A. A. Liu, H. K. Kim, K. N. Tu, and P. Totta, "Microstructures of phased-in Cr-Cu/Cu/Au bump-limiting metallization and its behavior with high Pb content and eutectic PbSn solders," Appl. Phys. Lett., vol. 71, no. 20, p. 2946, 1997.
    • (1997) Appl. Phys. Lett. , vol.71 , Issue.20 , pp. 2946
    • Pan, G.Z.1    Liu, A.A.2    Kim, H.K.3    Tu, K.N.4    Totta, P.5
  • 8
    • 0015614563 scopus 로고
    • Interdiffusion and reaction in bimetallic Cu-Sn thin films
    • Apr.
    • K. N. Tu, "Interdiffusion and reaction in bimetallic Cu-Sn thin films," Acta Metallurg., vol. 21, p. 347, Apr. 1973.
    • (1973) Acta Metallurg. , vol.21 , pp. 347
    • Tu, K.N.1
  • 9
    • 0032182488 scopus 로고    scopus 로고
    • Eutectic Pb/Sn solder bump and under bump metallurgy (UBM) interfacial reaction and adhesion
    • S.-Y. Jang and K.-W. Paik, "Eutectic Pb/Sn solder bump and under bump metallurgy (UBM) interfacial reaction and adhesion," Soldering Surface Mount Technol., vol. 10, no. 3, p. 29, 1998.
    • (1998) Soldering Surface Mount Technol. , vol.10 , Issue.3 , pp. 29
    • Jang, S.-Y.1    Paik, K.-W.2
  • 11
    • 51649143798 scopus 로고
    • The growth of Cu-Sn intermetallics at a pretinned copper-solder interface
    • A. J. Sunwoo, J. W. Morris Jr., and G. K. Lucey Jr., "The growth of Cu-Sn intermetallics at a pretinned copper-solder interface," Metallurg. Trans. A, vol. 23A, p. 1323, 1992.
    • (1992) Metallurg. Trans. A , vol.23 A , pp. 1323
    • Sunwoo, A.J.1    Morris J.W., Jr.2    Lucey G.K., Jr.3
  • 12
    • 0000813085 scopus 로고    scopus 로고
    • Ripening-assisted asymetric spalling of Cu-Sn compound spheroids in solder joints on Si wafers
    • H. K. Kim, K. N. Tu, and P. A. Totta, "Ripening-assisted asymetric spalling of Cu-Sn compound spheroids in solder joints on Si wafers," Appl. Phys. Lett., vol. 68, no. 16, p. 2204, 1996.
    • (1996) Appl. Phys. Lett. , vol.68 , Issue.16 , pp. 2204
    • Kim, H.K.1    Tu, K.N.2    Totta, P.A.3
  • 13
    • 0001138647 scopus 로고    scopus 로고
    • 5 spheroid in the soldering reaction of eutectic SnPb on Cr/Cu/Au thin films
    • 5 spheroid in the soldering reaction of eutectic SnPb on Cr/Cu/Au thin films," Appl. Phys. Lett., vol. 80, no. 6, p. 2774, 1996.
    • (1996) Appl. Phys. Lett. , vol.80 , Issue.5 , pp. 2774
    • Liu, A.A.1    Kim, H.K.2    Tu, K.N.3    Totta, P.A.4
  • 14
    • 0029223405 scopus 로고
    • Rapid formation of intermetallic compounds by interdiffusion in the Cu-Sn and Ni-Sn systems
    • S. Bader, W. Gust, and H. Hieber, "Rapid formation of intermetallic compounds by interdiffusion in the Cu-Sn and Ni-Sn systems," Acta Metall., vol. 43, no. 11, p. 329, 1995.
    • (1995) Acta Metall. , vol.43 , Issue.11 , pp. 329
    • Bader, S.1    Gust, W.2    Hieber, H.3
  • 15
    • 51249162222 scopus 로고
    • Analysis of low-temperature intermetallic growth in copper-tin diffusion couples
    • Z. Mei, A. J. Sunwoo, and J. W. Morris Jr., "Analysis of low-temperature intermetallic growth in copper-tin diffusion couples," Metal. Trans. A, vol. 23A, p. 857, 1992.
    • (1992) Metal. Trans. A , vol.23 A , pp. 857
    • Mei, Z.1    Sunwoo, A.J.2    Morris J.W., Jr.3
  • 16
    • 0031185622 scopus 로고    scopus 로고
    • Activation energies of intermetallic growth of Sn-Ag eutectic solder on copper substrates
    • D. R. Flanders, E. G. Jacobs, and R. F. Pinizzotto, "Activation energies of intermetallic growth of Sn-Ag eutectic solder on copper substrates," J. Electron. Mater., vol. 26, no. 7, p. 883, 1997.
    • (1997) J. Electron. Mater. , vol.26 , Issue.7 , pp. 883
    • Flanders, D.R.1    Jacobs, E.G.2    Pinizzotto, R.F.3
  • 17
    • 0000072496 scopus 로고    scopus 로고
    • Kinetic analysis of the soldering reaction between eutectic SnPb alloy and Cu accompanied by ripening
    • H. K. Kim and K. N. Tu, "Kinetic analysis of the soldering reaction between eutectic SnPb alloy and Cu accompanied by ripening," Phys. Rev. B, vol. 53, no. 23, p. 16 027, 1996.
    • (1996) Phys. Rev. B , vol.53 , Issue.23 , pp. 16027
    • Kim, H.K.1    Tu, K.N.2
  • 18
    • 0032208001 scopus 로고    scopus 로고
    • Theory for intermetallic phase growth between Cu and liquid Sn-Pb solder based on grain boundary diffusion control
    • M. Schaefer et al., "Theory for intermetallic phase growth between Cu and liquid Sn-Pb solder based on grain boundary diffusion control," J. Electron. Mater., vol. 27, no. 11, p. 1167, 1998.
    • (1998) J. Electron. Mater. , vol.27 , Issue.11 , pp. 1167
    • Schaefer, M.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.