Digitally controllable variable high-Q MEMS capacitor for RF applications

IEEE MTT-S International Microwave Symposium Digest

Volumn 1, Issue , 2001, Pages 2115-2118

  Hoivik, Nils ^a   Michalicek, M A ^a   Lee, Y C ^a   Gupta, K C ^a   Bright, V M ^a  

^a UCB 450   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DIGITAL CONTROL SYSTEMS; ELECTRIC POTENTIAL; ELECTROSTATICS; FLIP CHIP DEVICES; MICROELECTROMECHANICAL DEVICES; Q FACTOR MEASUREMENT; TUNING;

BONDING PADS; ELECTROSTATIC FORCES;

CAPACITORS;

EID: 0035686445     PISSN: 0149645X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)

1. RF MEMS from a device perspective
2. Design and modeling of RF MEMS tunable capacitors using electro-thermal actuators
3. RF MEMS variable capacitors for tunable filters
4. Micromachined electro-mechanically tunable capacitors and their applications to RF IC's
5. Micromirror arrays fabricated by flip-chip assembly
6. Flip-chip assembly for SI-based RF MEMS
7. Quick prototyping of flip chip assembly with MEMS