Digital-type RF MEMS switched capacitors

IEEE MTT-S International Microwave Symposium Digest

Volumn 2, Issue , 2002, Pages 1217-1220

  Rizk, Jad B ^a   Rebeiz, Gabriel M ^a  

^a University of Michigan   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE; ELECTRIC RESISTANCE; ELECTRODES; INSERTION LOSSES; MICROELECTROMECHANICAL DEVICES; SEMICONDUCTOR SWITCHES; SILICON WAFERS; WAVEGUIDES;

HIGH CAPACITANCE RATIO; MICROELECTROMECHANICAL SWITCHED CAPACITOR;

CAPACITORS;

EID: 0036070285     PISSN: 0149645X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)

1. Performance of low-loss RF MEMS capacitive switches
2. High-isolation CPW MEMS shunt switches; Part 1: Modeling
3. MEMS devices for high isolation switching and tunable filtering
4. High-isolation W-band MEMS switches
5. RF MEMS variable capacitors for tunable filters
6. RF MEMS-based tunable filters