Feasibility demonstration of a multi-level thin film BST capacitor technology

IEEE International Symposium on Applications of Ferroelectrics

Volumn , Issue , 1998, Pages 11-14

  Watt, M M ^a   Woo, P ^a   Rywak, T ^a   McNeil, L ^a   Kassam, A ^a   Joshi, V ^a   Cuchiaro, J D ^a   Melnick, B M ^a  

^a Gennum Corporation   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

BARIUM COMPOUNDS; CAPACITANCE; ELECTRODES; FERROELECTRIC DEVICES; PLATINUM; SEMICONDUCTING SILICON; THIN FILM DEVICES;

THIN FILM FERROELECTRIC MULTILEVEL CAPACITORS (MLC);

CERAMIC CAPACITORS;

EID: 0032271643     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (4)