Oxide films for integrated capacitors in thin film functional modules

Materials Research Society Symposium - Proceedings

Volumn 655, Issue , 2001, Pages

  Klee, M ^a   Wissen, D ^a   Keur, W ^b   Kiewitt, R ^a   Bausen, D ^a   Lok, P ^b  

^a PHILIPS RESEARCH LABORATORIES   (Germany)

^b PHILIPS RESEARCH LABORATORIES   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 24144474669     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (20)

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