Monitoring of CF and CF2 number density by optical emission intensity corrected using probe-measured plasma parameters

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 42, Issue 2 A, 2003, Pages 663-667

  Nakano, Toshiki ^a   Yanagita, Katsushi ^a  

^a NATIONAL DEFENSE ACADEMY   (Japan)

Author keywords

CF; CF2; Inductively coupled plasma; Laser induced fluorescence; Optical emission

Indexed keywords

CARRIER CONCENTRATION; ELECTRON ENERGY LEVELS; FLUORESCENCE; FLUOROCARBONS; FREE RADICALS; LASER APPLICATIONS; LIGHT EMISSION; PLASMA DENSITY; PLASMA PROBES;

ELECTRON ENERGY DISTRIBUTION FUNCTION; HIGH-DENSITY PLASMA; LASER-INDUCED FLUORESCENCE;

INDUCTIVELY COUPLED PLASMA;

EID: 0038682102     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.42.663     Document Type: Article

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