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Volumn 40, Issue 4, 2003, Pages 184-192

Materials processing by focused ion beams for TEM sample preparation and nanostructuring;Materialbearbeitung mittels fokussierter ionenstrahlen zur TEM-probenpräparation und nanostrukturierung

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; DEPOSITION; ETCHING; GALLIUM; ION BEAMS; MACHINING; NANOSTRUCTURED MATERIALS; NANOTECHNOLOGY; OPTICAL MICROSCOPY; REMOVAL; SAMPLING; STRUCTURE (COMPOSITION);

EID: 0038681908     PISSN: 0032678X     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article
Times cited : (2)

References (11)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.