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Volumn 40, Issue 4, 2003, Pages 184-192
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Materials processing by focused ion beams for TEM sample preparation and nanostructuring;Materialbearbeitung mittels fokussierter ionenstrahlen zur TEM-probenpräparation und nanostrukturierung
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Author keywords
[No Author keywords available]
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Indexed keywords
CHEMICAL VAPOR DEPOSITION;
DEPOSITION;
ETCHING;
GALLIUM;
ION BEAMS;
MACHINING;
NANOSTRUCTURED MATERIALS;
NANOTECHNOLOGY;
OPTICAL MICROSCOPY;
REMOVAL;
SAMPLING;
STRUCTURE (COMPOSITION);
DEFECTIVE STRUCTURES;
GALLIUM IONS;
MATERIALS PROCESSING;
SAMPLE PREPARATION;
TRANSMISSION ELECTRON MICROSCOPY;
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EID: 0038681908
PISSN: 0032678X
EISSN: None
Source Type: Journal
DOI: None Document Type: Article |
Times cited : (2)
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References (11)
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