Micromachining of complex channel systems in 3D quartz substrates using Q-switched Nd:YAG laser

Applied Physics A: Materials Science and Processing

Volumn 74, Issue 6, 2002, Pages 773-777

  Qin, S J ^a   Li, W J ^a  

^a CHINESE UNIVERSITY OF HONG KONG   (Hong Kong)

Author keywords

[No Author keywords available]

Indexed keywords

CHANNEL FLOW; FLUIDIC DEVICES; IRRADIATION; LASER PRODUCED PLASMAS; LASER PULSES; MELTING; MICROCRACKS; MICROMACHINING; Q SWITCHED LASERS; SCANNING ELECTRON MICROSCOPY; SUBSTRATES;

FRACTURING; LASER-INDUCED PLASMA; MICROCHANNEL FABRICATION; THREE DIMENSIONAL CHANNEL SYSTEM; THREE-DIMENSIONAL QUARTZ SUBSTRATE;

QUARTZ;

EID: 0036604264     PISSN: 09478396     EISSN: None     Source Type: Journal    
DOI: 10.1007/s003390100943     Document Type: Article

References (9)