Characterization and formation mechanism of macroparticles in arc ion-plated CrN thin films

Journal of the Electrochemical Society

Volumn 150, Issue 5, 2003, Pages

  Shiao, M H ^a   Chang, Z C ^a   Shieu, F S ^a  

^a NATIONAL CHUNG HSING UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL MICROSTRUCTURE; ELECTRON ENERGY LOSS SPECTROSCOPY; MORPHOLOGY; PARTICLE SIZE ANALYSIS; SCANNING ELECTRON MICROSCOPY; STAINLESS STEEL; TRANSMISSION ELECTRON MICROSCOPY;

CHROMIUM NITRIDE; ENERGY FILTERING TRANSMISSION ELECTRON MICROSCOPY; MACROPARTICLES;

THIN FILMS;

EID: 0038517003     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1564107     Document Type: Article

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