Effects of macroparticle separation in positively biased ducts in the filtered vacuum arc deposition systems

Surface and Coatings Technology

Volumn 108-109, Issue , 1998, Pages 148-153

  Beilis, I I ^a   Keidar, M ^a   Boxman, R L ^a   Goldsmith, S ^a  

^a TEL AVIV UNIVERSITY   (Israel)

Author keywords

Filtered vacuum arc; Macroparticles; Positive bias

Indexed keywords

CARBON; CATHODES; COMPUTATIONAL METHODS; COPPER; DEPOSITION; ELECTRON TRAPS; ELECTROSTATICS; MATHEMATICAL MODELS; PARTICLE SIZE ANALYSIS; SEPARATION; TITANIUM; VACUUM APPLICATIONS;

MACROPARTICLES; STICKING COEFFICIENT; VACUUM ARC DEPOSITION;

PARTICLES (PARTICULATE MATTER);

EID: 0039181905     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(98)00657-4     Document Type: Article

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