Thermal analysis of macroparticles during vacuum arc deposition of TiN

Surface and Coatings Technology

Volumn 92, Issue 1-2, 1997, Pages 50-55

  Cheng, Zhongyuan ^a   Wang, Min ^a   Zou, Jiyan ^b  

^a NANJING UNIVERSITY OF AERONAUTICS AND ASTRONAUTICS   (China)

^b HUAZHONG UNIVERSITY OF SCIENCE AND TECHNOLOGY   (China)

Author keywords

Macroparticles; Thermal equilibrium; TiN films; Vacuum arc

Indexed keywords

CATHODES; DEPOSITION; MATHEMATICAL MODELS; MORPHOLOGY; PARTICLES (PARTICULATE MATTER); SCANNING ELECTRON MICROSCOPY; SOLIDIFICATION; SUBSTRATES; THERMOANALYSIS; VACUUM APPLICATIONS;

MACROPARTICLES; VACUUM ARC DEPOSITION;

TITANIUM NITRIDE;

EID: 0031168073     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(97)00011-X     Document Type: Article

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