Macroparticle interaction with a substrate in cathodic vacuum arc deposition

Surface and Coatings Technology

Volumn 86-87, Issue PART 1, 1996, Pages 415-420

  Keidar, M ^a   Beilis, I ^a   Boxman, R L ^a   Goldsmith, S ^a  

^a TEL AVIV UNIVERSITY   (Israel)

Author keywords

Cathodic vacuum arc deposition; Macroparticle interaction; Temperature evolution

Indexed keywords

CALCULATIONS; ELECTRIC BREAKDOWN; EQUATIONS OF MOTION; FRICTION; IONS; PLASMA DENSITY; PROBABILITY; REFLECTION; SUBSTRATES; TEMPERATURE;

CATHODIC VACUUM ARC DEPOSITION; ION FRICTION; MACROPARTICLE INTERACTION; TEMPERATURE EVOLUTION; VELOCITY DISTRIBUTION; VOLTAGE DROP;

DEPOSITION;

EID: 0030395150     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(96)02976-3     Document Type: Article

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