-
1
-
-
85037889551
-
-
The Physics and Chemistry of (Formula presented) and the (Formula presented) Interface-3, edited by H. Z. Massoud, E. H. Poindexter, and C. R. Helms (The Electrochemical Society, Los Angeles, 1996).
-
The Physics and Chemistry of (Formula presented) and the (Formula presented) Interface-3, edited by H. Z. Massoud, E. H. Poindexter, and C. R. Helms (The Electrochemical Society, Los Angeles, 1996).
-
-
-
-
2
-
-
0345024108
-
-
The Electrochemical Society, Pennington, NJ S. I. Raider K. B. Sundaram W. D. Brown M. J. Deen
-
J. H. Stathis, E. Cartier, A. H. Edwards, and E. H. Poindexter, in Silicon Nitride and Silicon Dioxide Thin Insulating Films IV, edited by M. J. Deen, W. D. Brown, K. B. Sundaram, and S. I. Raider (The Electrochemical Society, Pennington, NJ, 1997), p. 259.
-
(1997)
Silicon Nitride and Silicon Dioxide Thin Insulating Films IV
, pp. 259
-
-
Stathis, J.H.1
Cartier, E.2
Edwards, A.H.3
Poindexter, E.H.4
-
4
-
-
36449007231
-
-
Z. Q. Yao, H. B. Harrison, S. Dimitrijev, and D. Sweatman, Appl. Phys. Lett. 64, 3584 (1994).
-
(1994)
Appl. Phys. Lett.
, vol.64
, pp. 3584
-
-
Yao, Z.Q.1
Harrison, H.B.2
Dimitrijev, S.3
Sweatman, D.4
-
6
-
-
85037907222
-
-
H. J. von Bardeleben, J. L. Cantin, L. G. Gosset, J. J. Ganem, I. Trimaille, and S. Rigo, J. Noncryst. Solids (to be published).
-
-
-
von Bardeleben, H.J.1
Cantin, J.L.2
Gosset, L.G.3
Ganem, J.J.4
Trimaille, I.5
Rigo, S.6
-
7
-
-
0019529879
-
-
E. H. Poindexter, P. Caplan, B. Deal, and R. Razouk, J. Appl. Phys. 52, 879 (1981).
-
(1981)
J. Appl. Phys.
, vol.52
, pp. 879
-
-
Poindexter, E.H.1
Caplan, P.2
Deal, B.3
Razouk, R.4
-
9
-
-
0000839383
-
-
J. L. Cantin, M. Schoisswohl, H. J. von Bardeleben, N. H. Zoubir, and M. Vergnat, Phys. Rev. B 52, 11 599 (1995).
-
(1995)
Phys. Rev. B
, vol.52
, pp. 11 599
-
-
Cantin, J.L.1
Schoisswohl, M.2
von Bardeleben, H.J.3
Zoubir, N.H.4
Vergnat, M.5
-
13
-
-
35949005865
-
-
V. Ya. Bratus, S. S. Ishchenko, S. M. Okulov, I. P. Vorona, H. J. von Bardeleben, and M. Schoisswohl, Phys. Rev. B 50, 15 449 (1994).
-
(1994)
Phys. Rev. B
, vol.50
, pp. 15 449
-
-
Ya. Bratus, V.1
Ishchenko, S.S.2
Okulov, S.M.3
Vorona, I.P.4
von Bardeleben, H.J.5
Schoisswohl, M.6
-
14
-
-
85037907551
-
-
J. L. Cantin, M. Schoisswohl, H. J. von Bardeleben, V. Morrazzani, J. J. Ganem, and I. Trimaille, in Ref. 1, p. 28.
-
J. L. Cantin, M. Schoisswohl, H. J. von Bardeleben, V. Morrazzani, J. J. Ganem, and I. Trimaille, in Ref. 1, p. 28.
-
-
-
-
15
-
-
0345024108
-
-
Electrochemcial Society, Pennington, NJ
-
J. H. Stathis, E. Cartier, A. H. Edwards, and E. H. Poindexter, in Silicon Nitride and Silicon Oxide Thin Insulating Films (Electrochemcial Society, Pennington, NJ, 1997), p. 259.
-
(1997)
Silicon Nitride and Silicon Oxide Thin Insulating Films
, pp. 259
-
-
Stathis, J.H.1
Cartier, E.2
Edwards, A.H.3
Poindexter, E.H.4
-
20
-
-
0001224373
-
-
S. Sitbon, M. C. Hugon, B. Agius, F. Abel, J. L. Courant, and M. Puech, J. Vac. Sci. Technol. A 13, 2900 (1995).
-
(1995)
J. Vac. Sci. Technol. A
, vol.13
, pp. 2900
-
-
Sitbon, S.1
Hugon, M.C.2
Agius, B.3
Abel, F.4
Courant, J.L.5
Puech, M.6
-
21
-
-
0021424901
-
-
R. P. Vasquez, M. H. Hecht, F. J. Grunthaner, and M. L. Naiùman, Appl. Phys. Lett. 44, 969 (1984).
-
(1984)
Appl. Phys. Lett.
, vol.44
, pp. 969
-
-
Vasquez, R.P.1
Hecht, M.H.2
Grunthaner, F.J.3
Naiùman, M.L.4
-
23
-
-
0000360487
-
-
K. H. Hwang, E. Yoon, K. W. Whang, and J. Y. Lee, Appl. Phys. Lett. 67, 3590 (1995).
-
(1995)
Appl. Phys. Lett.
, vol.67
, pp. 3590
-
-
Hwang, K.H.1
Yoon, E.2
Whang, K.W.3
Lee, J.Y.4
-
24
-
-
85037883485
-
-
J. L. Cantin, Ph.D. thesis, Université Paris 6 (1997).
-
J. L. Cantin, Ph.D. thesis, Université Paris 6 (1997).
-
-
-
-
25
-
-
0029488963
-
-
V. Bratus, S. S. Ishchenko, S. M. Okulov, I. P. Vornoa, and H. J. von Bardeleben, Mater. Sci. Forum 196-201, 529 (1995).
-
(1995)
Mater. Sci. Forum
, vol.196-201
, pp. 529
-
-
Bratus, V.1
Ishchenko, S.S.2
Okulov, S.M.3
Vornoa, I.P.4
von Bardeleben, H.J.5
-
27
-
-
0026838592
-
-
W. L. Warren, J. Kanicki, F. C. Rong, and E. H. Poindexter, J. Electrochem. Soc. 139, 880 (1992).
-
(1992)
J. Electrochem. Soc.
, vol.139
, pp. 880
-
-
Warren, W.L.1
Kanicki, J.2
Rong, F.C.3
Poindexter, E.H.4
-
28
-
-
84987108906
-
-
N. Ishi, S. Oozora M. Kumeda, and T. Shimizu, Phys. Status Solidi B 114, K111 (1982).
-
(1982)
Phys. Status Solidi B
, vol.114
, pp. K111
-
-
Ishi, N.1
Oozora, S.2
Kumeda, M.3
Shimizu, T.4
-
29
-
-
3943050026
-
-
R. A. B. Devine, J. M. Francou, A. Inard, and J. Pelletier, Appl. Phys. Lett. 56, 1549 (1990).
-
(1990)
Appl. Phys. Lett.
, vol.56
, pp. 1549
-
-
Devine, R.A.B.1
Francou, J.M.2
Inard, A.3
Pelletier, J.4
-
31
-
-
0000050064
-
-
S. Garcia, I. Martil, G. G. Gonzales Diaz, E. Castan, S. Duenas, and M. Fernandez, J. Appl. Phys. 83, 332 (1998).
-
(1998)
J. Appl. Phys.
, vol.83
, pp. 332
-
-
Garcia, S.1
Martil, I.2
Gonzales Diaz, G.G.3
Castan, E.4
Duenas, S.5
Fernandez, M.6
-
32
-
-
36549104369
-
-
I. Odhomari, H. Akatsu, Y. Yamakoshi, and K. Kishimoto, J. Appl. Phys. 62, 3751 (1987).
-
(1987)
J. Appl. Phys.
, vol.62
, pp. 3751
-
-
Odhomari, I.1
Akatsu, H.2
Yamakoshi, Y.3
Kishimoto, K.4
-
35
-
-
0031271627
-
-
M. C. Hugon, F. Delmotte, B. Agius, and J. L. Courant, J. Vac. Sci. Technol. A 15, 3143 (1997).
-
(1997)
J. Vac. Sci. Technol. A
, vol.15
, pp. 3143
-
-
Hugon, M.C.1
Delmotte, F.2
Agius, B.3
Courant, J.L.4
|